[18a-D9-1~6] Flexible Electronics

▲ [18a-D9-5] Fabrication of Crystalized Functional Oxide Thin Films on Flexible Polymer Substrates

^○Hiroaki Nishikawa¹, Yusuke Morita¹, Miyoshi Yokura², Hidekazu Tanaka³, Tamio Endo² (B.O.S.T., Kinki Univ.¹, Grad. School Eng., Mie Univ.², ISIR-Sanken, Osaka Univ.³)

Keywords:機能性酸化物,エピタキシャル成長,フレキシブルデバイス