[18a-D9-1~6] Flexible Electronics

▲ [18a-D9-5] Fabrication of Crystalized Functional Oxide Thin Films on Flexible Polymer Substrates(30min.)

^○Hiroaki Nishikawa¹,Yusuke Morita¹,Miyoshi Yokura²,Hidekazu Tanaka³,Tamio Endo² (B.O.S.T., Kinki Univ.¹, Grad. School Eng., Mie Univ.², ISIR-Sanken, Osaka Univ.³)

キーワード：機能性酸化物,エピタキシャル成長,フレキシブルデバイス