The 61st JSAP Spring Meeting, 2014

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[18a-E12-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E12 (E206)

10:00 AM - 10:15 AM

[18a-E12-5] Influence of O3 on the properties of AlOx passivation film grown by mist CVD

○Takayuki Uchida1, Toshiyuki Kawaharamura2, Kenji Shibayama1, Shizuo Fujita1, Takahiro Hiramatsu3, Hiroyuki Orita3 (Graduate School of Eng., Kyoto Univ.1, Inst. for Nanotechnology, Kochi Univ. of Tech.2, TMEIC3)

Keywords:Si太陽電池,酸化アルミニウム,パッシベーション膜