The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-E13-1~11] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 9:00 AM - 12:00 PM E13 (E301)

10:00 AM - 10:15 AM

[18a-E13-5] Effect of pretreatment on carbonization of Si surface using CO gas

○Momoko Deura1, Ichiro Yonenaga1, Hiroyuki Fukuyama2 (IMR, Tohoku Univ.1, IMRAM, Tohoku Univ.2)

Keywords:炭化,シリコン,前処理