[18a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

[18a-E14-1] Uncooled infrared sensors with advanced functions using plasmonic metamaterials –asymmetric structure for polarization selective function-

^○Kyohei Masuda¹, Shinpei Ogawa^2,3, Yosuke Takagawa¹, Koichi Miyashita¹, Masafumi Kimata¹ (Ritsumeikan Univ.¹, Mitsubishi Electric Corp.², NMES Technology Research Org.³)

Keywords:plasmon,赤外線,偏光