The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E14 (E302)

10:45 AM - 11:00 AM

▼ [18a-E14-7] Fabrication of SiC/Si Hybrid Accelerometer for High Temperature Applications

○Rakesh Chand1, Masayoshi Esashi2, Shuji Tanaka1 (Tohoku Univ.1, Tohoku Univ., AIMR2)

Keywords:SiC,High temperature,Accelerometer