[18a-E2-1~5] 17.3 Exploration of new functions and evaluation of basic properties

[18a-E2-5] Electrical Characterization of Transition Metal Dichalcogenides Flakes using Self-sensing AFM Nanoprober

Ryu Shioda¹, Atsumi Oki¹, Yoshiyuki Amano¹, Naruki Ninomiya^2,3, Takahiro Mori³, Tsunehiro Oohira³, Taro Itatani³, ^○Atsushi Ando³ (Wafer Integration Inc.¹, Yokohama National Univ.², AIST³)

Keywords:遷移金属ダイカルコゲナイド,ナノプローバ