[18a-E4-1~10] 3.4 Optical measurement

[18a-E4-8] Comparative investigations of analysis methods in thickness inspections of ultrathin semiconductor wafers by means of white light reflectmetry

^○Teppei Onuki¹, Hirotaka Ojima¹, Jun Shimizu¹, Libo Zhou¹ (Ibaraki Univ.¹)

Keywords:薄ウェハ,coherence correlation interferometry,free spectral range