The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[18a-E8-1~10] 6.3 Oxide-based electronics

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E8 (E202)

9:45 AM - 10:00 AM

△ [18a-E8-4] Investigation of Etching Damage of TiO2 Thin Films Observed in XAS spectra

○Keiji Sano1, Masahito Niibe1, Retsuo Kawakami2, Yoshitaka Nakano3 (Univ. Hyogo1, Univ. Tokushima2, Chubu Univ.3)

Keywords:酸化チタン,XAS,エッチング