The 61st JSAP Spring Meeting, 2014

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Oral presentation

03. Optics » 3.3 Equipment and device optics

[18a-F10-1~7] 3.3 Equipment and device optics

Tue. Mar 18, 2014 9:00 AM - 10:45 AM F10 (F406)

9:45 AM - 10:00 AM

[18a-F10-4] Development of the Scatterometer using Quadruple Ellipsoidal Mirrors V

○Etsuo Kawate1 (AIST1)

Keywords:散乱計,楕円面鏡