The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[18a-F5-1~11] 7.2 Electron microscopes, evaluation, measurement and analysis

Tue. Mar 18, 2014 9:00 AM - 12:00 PM F5 (F305)

10:45 AM - 11:00 AM

[18a-F5-7] Beam Current Dependence of Surface Potential Distribution at an Insulator Film in Scanning Electron Microscope

○（M1）Kentaro Kumagai1, Yuki Handa1, Sosuke Hosoi1, Masatoshi Kotera1 (Osaka Inst.1)

Keywords:電子ビーム,帯電