[18a-F5-1~11] 7.2 Electron microscopes, evaluation, measurement and analysis

[18a-F5-9] Simulation of fogging electron trajectories considering magnetic field in Scanning Electron Microscope

^○Sosuke Hosoi¹, Kentaro Kumagai¹, Yuki Handa¹, Masatosi Kotera¹ (Osaka Inst.¹)

Keywords:simulation