The 61st JSAP Spring Meeting, 2014

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Poster presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[18a-PA3-1~2] 7.3 Lithography

Tue. Mar 18, 2014 9:30 AM - 11:30 AM PA3 (アリーナ)

9:30 AM - 11:30 AM

[18a-PA3-2] Study on Deprotonation Reaction of Solid Poly(4-hydroxystyrene) by Using Pulse Radiolysis

○Hiroki Yamamoto1, Kazumasa Okamoto2, Takahiro Kozawa1 (ISIR, Osaka Univ.1, Hokkaido Univ.2)

Keywords:パルスラジオリシス,レジスト,EUV