[18p-D1-1~21] 11.1 Fundamental properties

[18p-D1-10] Peculiar properties of Al thin films grown by atomic layer deposition

^○Yuichi Harada¹, Hajime Suzuki^1,2, Hiroshi Yamaguchi¹ (NTT BRL¹, Tokyo Univ. of Science²)

Keywords:原子層成長法,アルミニウム薄膜,臨界温度