[18p-D10-1~9] Innovation of Ferroelectrics for Materials and Devices

[18p-D10-9] Direct patterning method of sol-gel PZT films by using removable microchannel chip

^○Hirotaka Hida¹, Shun Yagami¹, Isaku Kanno¹ (Kobe Univ.¹)

Keywords:薄膜パターニング技術,ゾルゲル法,マイクロ流路チップ