The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-D6-1~19] 6.2 Carbon-based thin films

Tue. Mar 18, 2014 1:30 PM - 6:45 PM D6 (D209)

2:30 PM - 2:45 PM

△ [18p-D6-5] Defect examination of heteroepitaxial diamond by etch pit method Ⅴ

○Kimiyoshi Ichikawa1, Hideyuki Kodama1, Kazuhiro Suzuki2, Atsuhito Sawabe1 (Aoyama Gakuin Univ.1, TOPLAS ENG.2)

Keywords:Diamond,Etching,Dislocation