[18p-E12-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

[18p-E12-18] Study of substrate temperature characteristic in a-Si:H, a-SiO:H, a-SiC:H

^○Yasushi Sobajima^1,2, Yoshihiko Kitani¹, Kan Tanaka¹, Takahiro Yada¹, Chitose Sada^1,2, Akihisa Matsuda^1,2, Hiroaki Okamoto^1,2 (Grad. School of Eng. Sci., Osaka Univ.¹, JST-CREST²)

Keywords:薄膜太陽電池