[18p-E12-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [18p-E12-19] Study of Growth Mechanism of a-Si_1-xC_x:H during Plasma-Enhanced Chemical Vapor Deposition using Quantum Chemical Molecular Dynamics Method

^○（D）Takuya Kuwahara¹, Hiroshi Ito¹, Yuji Higuchi¹, Nobuki Ozawa¹, Momoji Kubo¹ (Tohoku Univ.¹)

Keywords:self-consistent charge density-functional tight-binding,a-Si_1-xC_x:H,プラズマCVD