[18p-E13-1~18] 15.4 III-V-group nitride crystals

[18p-E13-18] Structural characterization of hexigonal boron nitride films grown on asapphire substrate by CVD

^○Iori Kuwahara¹, Naoki Umehara¹, Tetsuya Kouno³, Hiroko Kominami³, Yoichiro Nakanishi¹, Kazuhiko Hara^1,2 (Shizuoka Univ.¹, Shizuoka Univ.², Shizuoka Univ.³)

Keywords:六方晶窒化ホウ素,CVD,in-plane XRD