The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

4:45 PM - 5:00 PM

[18p-E14-14] Thermodynamics of carbothermic reduction for solar grade silicon

○Kenji Itaka1 (Hirosaki Univ,1)

Keywords:シリカ,触媒,還元