5:15 PM - 5:30 PM
[18p-E14-16] Laser Transfer of BST Thin Film to LiNbO3 Substrate
Keywords:レーザー転写,接合,有限要素法
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration
Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)