[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-7] PDMS-made Bacteria Trapping Chip using Beads

^○Ryuhei Hayashi¹, Hirokazu Nakazawa¹, Yuusuke Nishimura¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida^2,3, Kazuya Masu², Kenichirou Iida⁴, Mitumasa Saito⁴, Shinichi Yoshida⁴ (Toyohashi Univ. of Technology¹, Tokyo Institute of Technology², NTT-AT³, Graduate School of Medical Sciences, Kyushu Univ.⁴)

Keywords:MEMS,レジオネラ,蛍光