[18p-E16-1~14] 4.2 Photonic nonostructures and phenomena

△ [18p-E16-11] Effect of structure of ion-sheath control plate on angled plasma etching

^○Keisuke Kitano¹, Kenji Ishizaki¹, Susumu Noda¹ (Kyoto Univ.¹)

Keywords:3次元フォトニック結晶,プラズマエッチング