[18p-E17-1~20] 4.5 THz technology

▲ [18p-E17-18] Length Dependence of Microbolometer Characterisitcs

^○Ajay Tiwari¹, Hiroaki Satoh¹, Makoto Aoki², Masanori Takeda², Norihisa Hiromoto², Hiroshi Inokawa¹ (Shizuoka Univ.¹, Shizuoka Univ.²)

Keywords:マイクロボロメータ,受光感度,遮断周波数