[18p-E2-1~18] 17.1 Growth technology

[18p-E2-2] Role of [1-100] steps in graphene growth on SiC(0001) Si face

^○Hiroyuki Kageshima¹, Hiroki Hibino¹, Hiroshi Yamaguchi¹, Masao Nagase² (NTT Basic Research Labs.¹, Univ. Tokushima²)

Keywords:グラフェン,SiC,成長機構