[18p-F1-1~15] 7.1 X-ray technologies

[18p-F1-1] [INVITED]Development of a soft x-ray flat-field spectrograph in the 50-4000 eV range and its application to electron microscopies

^○Takashi Imazono¹, Masato Koike¹, Tetsuya Kawachi¹, Noboru Hasegawa¹, Masaru Koeda², Tetsuya Nagano², Hiroyuki Sasai², Yuki Oue², Zeno Yonezawa², Satoshi Kuramoto², Masami Terauchi³, Hideyuki Takahashi⁴, Nobuo Handa⁴, Takanori Murano⁴ (JAEA¹, Shimadzu Corp.², Tohoku Univ.³, JEOL Ltd.⁴)

Keywords:軟Ｘ線発光,回折格子,電子顕微鏡