The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[18p-F1-1~15] 7.1 X-ray technologies

Tue. Mar 18, 2014 2:00 PM - 6:15 PM F1 (F201)

4:45 PM - 5:00 PM

[18p-F1-10] Modeling methods of atomic processes and radiation hydrodynamics of EUV sources

○Akira Sasaki1, Atsushi Sunahara2, Katsunobu Nishihara3 (JAEA1, ILT2, ILE, Osaka Univ.3)

Keywords:EUV光源,プラズマ,シミュレーション