[18p-F1-1~15] 7.1 X-ray technologies

△ [18p-F1-9] Measurement of absorption rate of laser light by laser driven EUV light source plasma

^○Hiraku Matsukuma¹, Teruyuki Ugomori¹, Kensuke Yoshida¹, Shogo Urabe¹, Chaogang Li², Shinsuke Fujioka¹, Hiroaki Nishimura¹, Eiji Sato³, Toshihiro Somekawa⁴, Tatsuya Yanagida⁵ (Osaka Univ.¹, Setsunan Univ.², NAT³, ILT⁴, Giga Photon⁵)

Keywords:EUV光源