[18p-F10-1~16] 3.5 Information optics & photonics

[18p-F10-6] Nanostructure estimation based on digital super-resolution microscopy (DiSRIM)

^○Shinji Ishikawa¹, Yoshio Hayasaki¹ (Utsunomiya Univ. CORE¹)

Keywords:干渉計測,超解像,パターンマッチング