The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[18p-F2-1~13] 7.3 Lithography

Tue. Mar 18, 2014 2:00 PM - 5:45 PM F2 (F204)

5:30 PM - 5:45 PM

[18p-F2-13] Reduction of Turn-Around-Time in Three-Dimensional EB Lithography

○Kenji Yamazaki1, Hiroshi Yamaguchi1 (NTT Basic Research Labs.1)

Keywords:3Dナノ加工,立体ナノ加工