[18p-F2-1~13] 7.3 Lithography

[18p-F2-6] Formation of randomly-aligned in-plane cylindrical domains of polystyrene-b-polydimethylsiloxane by thermal annealing method

^○Toru Yamaguchi¹, Akira Fujiwara¹ (NTT BRL¹)

Keywords:リソグラフィ,ブロック共重合体