[18p-F3-1~19] 7.4 Nanoimprint

△ [18p-F3-1] 0.3 nm-high atomic-step patterning onto large PMMA surface by thermal nanoimprint

^○Geng Tan¹, Naoya Inoue¹, Tomoyuki Funabasama¹, Masahiro Mita², Norimichi Okuda³, Junichi Mori⁴, Koji Koyama⁵, Masaru Nakagawa⁶, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Inst. Tech¹, Kyodo Int'l Inc.², SCIVAX Inc.³, Front-L Tech. Inc.⁴, Namiki Inc.⁵, Tohoku Univ.⁶)

Keywords:熱ナノインプリント,PMMA