Fabrication of patterned protrusions using nano-patterned resist film

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

4:45 PM - 5:00 PM

^○Osamu Yamazaki¹, Nao Shirokura¹, Jun Koike¹, Fujito Yamaguchi¹, Masatoshi Maeda¹, Shinji Arihisa¹ (Asahi Kasei E-materials¹)

Keywords:凹凸,賦形