Evaluation of release property of HSQ with PDMS additive imprinted by room temperature nanoimprinting

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

5:15 PM - 5:30 PM

^○Norihiro Sugano¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (Univ. of hyogo¹)

Keywords:HSQ　,PDMS