The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[18p-F3-1~19] 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

5:45 PM - 6:00 PM

△ [18p-F3-15] Simulation Study on Resist Shrinkage and De-molding Process in NIL

○（B）Takamitsu Tochino1, Takahiro Shiotsu1, Kimiaki Uemura1, Masaaki Yasuda1, Hiroiaki Kawata1, Yoshihiko Hirai1 (Osaka Pref. Univ.1, Osaka Pref. Univ.2, Osaka Pref. Univ.3, Osaka Pref. Univ.4, Osaka Pref. Univ.5, Osaka Pref. Univ.6)

Keywords:ナノインプリント,離型,シミュレーション