The 61st JSAP Spring Meeting, 2014

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07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[18p-F3-1~19] 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

2:45 PM - 3:00 PM

△ [18p-F3-4] The pattern formation method by electrode imprint lithography.

○Harutake Uchida1, Makoto Fukuda1, Atsushi Yokoo2 (Hirosaki Univ.1, NTT Nanophotonics Center, NTT Basic Research Lab.2)

Keywords:パタン形成,ナノインプリント