Formation mechanism of fine structures on glass by electrical nanoimprint

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

3:15 PM - 3:30 PM

^○Takahiro Misawa¹, Naoki Ikutame¹, Daisuke Sakai¹, Tarou Abe¹, Kenji Harada², Junji Nishii¹ (Hokkaido Univ.¹, Kitami Inst. of Tech.²)

Keywords:電圧印加ガラスインプリント