The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[18p-F3-1~19] 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

3:30 PM - 3:45 PM

[18p-F3-7] Formation of Polarizer 6 inch whole wafer by NIL

○Ryuta Washiya1, Shiro Nagashima2, Masaki Sugita2, Akihisa Uchida2, Akihiro Miyauchi1 (Hitachi, Ltd.1, Hitachi Media Electronics Co., Ltd.2)

Keywords:ナノインプリント,Nanoimprint