Fabrication of imprint mold for 3D fluid channels by multiple step mask

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

3:45 PM - 4:00 PM

^○Hiroaki Kawata¹, Kazuma Shimomukai¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (Osaka Pref. Univ,¹)

Keywords:インプリント,三次元流路,モールド