The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[18p-F3-1~19] 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

4:00 PM - 4:15 PM

[18p-F3-9] Fabrication of UV Nanoimprint Molds for In-Liquid Alignment

Kenta Suzuki1,2, Sung-Won Youn1,2, Qing Wang1,2, Hiroshi Hiroshima1,2 (AIST1, JST-CREST2)

Keywords:UVナノインプリント,液中アライメント