Fabrication of UV Nanoimprint Molds for In-Liquid Alignment

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

4:00 PM - 4:15 PM

^○Kenta Suzuki^1,2, Sung-Won Youn^1,2, Qing Wang^1,2, Hiroshi Hiroshima^1,2 (AIST¹, JST-CREST²)

Keywords:UVナノインプリント,液中アライメント