The 61st JSAP Spring Meeting, 2014

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Symposium planned by Program Committee » The Current Status and Perspective of Plasma Processing for Graphene Industries in the 21st Century

[18p-F7-2~10] The Current Status and Perspective of Plasma Processing for Graphene Industries in the 21st Century

Tue. Mar 18, 2014 1:45 PM - 6:00 PM F7 (F307)

4:15 PM - 4:45 PM

[18p-F7-7] Doping of nitrogen to graphene by RF plasma

○Koichiro Saiki1 (Univ. of Tokyo1)

Keywords:RFプラズマ,窒素ドープ