[18p-PA12-1~10] 13.4 Devices/Integration Technologies

[18p-PA12-1] Evaluation of Electron Transport Property at 4 K for Long Channel Transistor with a One-Dimensional Phosphorus Dopant Array

^○Kuninori Kumagai¹, Enrico Prati², Masahiro Hori³, Yuiko Fukui¹, Takashi Tanii¹, Takahiro Shinada⁴ (Waseda Univ.¹, CNR-IFN², Univ. of Toyama³, AIST⁴)

Keywords:ドーパント配列,トランジスタ,長チャネル