[18p-PA2-1~11] 3.4 Optical measurement

[18p-PA2-2] Nano-structure Evaluation using Transmission Type of Spectroscopic Mueller Matrix Polarimeter and Boundary Element Method

^○（M1）Yo Kamata¹, Jun-ichiro Sugisaka^1,2, Yukitoshi Otani¹, Toyohiko Yatagai¹ (CORE,Utsunomiya University¹, Kitami Institute of Technology²)

Keywords:偏光計測