[18p-PA6-1~5] 8.2 Plasma measurements and diagnostics

[18p-PA6-3] Measurements of current-voltage characteristics of metals in capacitive coupled Ar rf plasmas Ⅸ

^○Takashi Kubo¹ (Hiroshima Kokusai Gakuin Univ.¹)

Keywords:プローブ,高周波,プラズマ