The 61st JSAP Spring Meeting, 2014

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Poster presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[18p-PG1-1~2] 7.2 Electron microscopes, evaluation, measurement and analysis

Tue. Mar 18, 2014 1:30 PM - 3:30 PM PG1 (G棟2階)

1:30 PM - 3:30 PM

[18p-PG1-1] Development of high-precision analysis of multilayer structure

○Tatsuya Shiramizu1, Hiroyuki Kawahara1, Tetsuya Uetsuji1 (Advanced Technology R&D Center, Mitsubishi Electric Corp.1)

Keywords:飛行時間型二次イオン質量分析,積層構造,深さ方向元素分布分析