[18p-PG8-1~8] 6.5 Surface physics and vacuum

[18p-PG8-6] Study on contribution of oxygen for NEA surface activation process

^○Kazuya Hayase¹, Katsunari Suzuki¹, Yuta Inagaki¹, Ryosuke Chiba¹, Hokuto Iijima¹, Takashi Meguro¹ (Tokyo University of Science¹)

Keywords:NEA,GaAs,SPA