The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19a-D10-1~13] 6.1 Ferroelectric thin films

Wed. Mar 19, 2014 9:00 AM - 12:30 PM D10 (D316)

9:00 AM - 9:15 AM

[19a-D10-1] High throughput PZT process for 8 inch wafer

○Toshihiro Doi1, Hideaki Sakurai1, Nobuyuki Soyama1 (Mitsubishi Materials Corp.1)

Keywords:PZT,薄膜,ゾルゲル