The 61st JSAP Spring Meeting, 2014

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16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[19a-D2-1~11] 16.2 Processing technologies and devices

Wed. Mar 19, 2014 9:30 AM - 12:30 PM D2 (D113)

9:30 AM - 9:45 AM

[19a-D2-1] Decomposition processes of diborane on heated W wire surfaces

○Hironobu Umemoto1,2, Taijiro Kanemitsu1,2, Akihito Tanaka1 (Shizuoka Univ.1, JST CREST2)

Keywords:CVD,気相診断