Amorphous Silicon Carbide Films using Silicon Ink

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

Wed. Mar 19, 2014 9:30 AM - 12:30 PM D2 (D113)

10:15 AM - 10:30 AM

^○Takashi Masuda^1,2, Zhongrong Shen^1,3, Hideyuki Takagishi^1,3, Keisuke Ohdaira^1,2,3, Tatsuya Shimoda^1,2,3 (JAIST¹, JAIST-GDRC², JST-ALCA³)

Keywords:シリコンインク